MIL-STD-1330D(SH)
20 September 1996
5.1.7 Tools and equipment. Tools and equipment brought into a cleanroom or controlled area shall be free of visible soil and particulate. Tools and equipment used in direct contact with oxygen clean surfaces shall be cleaned in accordance with this standard. Where the configuration of the tool or equipment prevents cleaning in accordance with this standard such as micrometers and dial indicators, all exposed surfaces shall be wiped clean with an approved final cleaning solvent or solution and inspected as specified in 5.13.1 for visual cleanliness.
5.2 Aqueous component cleaning process.
5.2.1 Applicability. This aqueous component cleaning process is applicable to items that can be fully immersed in the ultrasonic tank or parts washer specified in 5.2.3. Large components such as flasks shall be cleaned as specified in 5.3 (see 6.3).
5.2.2 Objective. The objective of the aqueous component cleaning process is to remove all visible soil and particulate during the pre-clean and rinse step as specified in 5.2.4 before proceeding to a final clean, verification, and rinse
step as specified in 5.2.5. The objective of the final clean, verification, and rinse step is to apply an oxygen and life support safe cleaning agent to remove thin soil films and particulate that may remain after the pre-clean step and to verify the required cleanliness. An effective pre-clean step increases the probability of a successful final clean and verification step reducing overall process cost and time.
5.2.3 Material and equipment.
(a) A supply of rinse water and associated equipment such as sinks, spray nozzles, and ultrasonic tanks.
(b) A supply of compatible pre-cleaner as specified in 4.3, 4.4, or 4.5 and associated equipment such as brushes, sinks, spray nozzles,
and ultrasonic tanks.
(c) A supply of NOC or TSP final cleaner as specified in 4.3 in an
ultrasonic tank or a parts washer as specified in 5.2.3(f).
(d) A supply of nitrogen if used for drying.
(e) An oxygen clean facility as specified in 5.1.
(f) An ultrasonic cleaning tank of sufficient size to allow complete
immersion of the component being cleaned. The tank shall be heated to 160EF for NOC or 180EF for TSP. Tanks using NOC should have a recirculating pump system and filter as specified in
4.3.1.9. The tank shall have a generator frequency of at least 25 kHz and a generator power per radiated surface of at least 3 watts/in2. The power per radiated surface area can be determined by dividing the total generator power by the surface area of tank bottom or side where the generator transducers are located. For example, a tank of dimensions 12 inches by 12 inches by 11 inches deep with a 600 watt transducer mounted on the bottom has a power of 4.2 watts/in2, or
A parts washer of sufficient size to completely contain the component being cleaned. The parts washer shall completely immerse the component in the cleaning agent and shall direct
cleaning agent across or through the component at a fluid velocity of not less than 3 feet per second (ft/sec). The parts washer shall be heated to 160EF for NOC or 180EF for TSP. Parts washers using NOC should have a recirculating pump and filter selected as specified in 4.3.1.9.
(g) Equipment to dry oxygen clean parts.
(h) Equipment to perform the applicable analyses as specified in 5.13.
This includes clean 1-liter containers as specified in appendix B
or C to obtain the required samples.
(i) Packaging material as specified in 5.16.
5.2.4 Pre-clean and rinse. Pre-cleaning should be accomplished in a well ventilated area outside of the cleanroom as follows:
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